Operation of MEMS Bistable Switch

MEMS:

Microelectromechanical systems (MEMS) also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).MEMS are separate and distinct from the hypothetical vision of molecular nanotechnology or molecular electronics. MEMS are made up of components between 1 to 100 micrometres in size (i.e. 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres (20 millionths of a metre) to a millimetre (i.e. 0.02 to 1.0 mm). They usually consist of a central unit that processes data (the microprocessor) and several components that interact with the outside such as microsensors.

Working:

The animation shows the bistable switch moving from the "off" position to the "on" position. The transition from "on" to "off" involves an identical set of operations.

The device operates in two dimensions, so it is easily implemented in MEMS by the MUMPS process. Certain parts of the structure became POLY1 and certain parts became POLY2, but the operation is identical to that shown here.

Operation of the Switch:

1. The purple platform is independently disengaged from the wheel.
2. The dark blue rod is pulled to signal a toggle.
3. The red lever structure amplifies the input movement.
4. The green arm advances the orange ratchet wheel one position, rotating around the yellow hub.
5. The green arm flicks back over the tooth so it can work again.
6. The light blue pawl holds the wheel while the green arm resets.
7. The purple platform engages again.
8. The new resting position of the platform is now different. 

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